Where to Buy Laser Lithography Equipment
Laser lithography is used for producing very fine structures, for example in the fabrication of computer chips. For highest resolution, laser sources with very short wavelength (in the ultraviolet) are required.
E | Related encyclopedia article: laser applications |
Related products: laser material processing devices
Related product category: applications
6 suppliers for laser lithography equipment are listed in the RP Photonics Buyer's Guide. Both manufacturers and distributors can be registered.
Suppliers with Ad Package | |
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Company | Product Description |
All wavelengths. Lochhamer Schlag 19 82166 Gräfelfing Germany Quality: ISO 9001:2015 www.toptica.com Social: Facebook, LinkedIn, YouTube E-mail: Tel.: +49 89 85 83 70 Fax: +49 89 85 83 72 00 | Photolithography is a microfabrication technique that is commonly used to pattern parts of a thin film or the bulk of a substrate. It is also often termed as optical lithography or UV lithography, if ultraviolett wavelengths are used. The techninque uses light to transfer a geometric pattern from a photomask onto a light-sensitive chemical ("photoresist" or "resist") on the substrate. This first irradiation step is followed by a series of chemical treatments that either engrave the exposed pattern into the material underneath the photoresist, or it enables deposition of a new material in the desired pattern on top of it. The optical lens system of photolithography setups is usually very complex and is inspected during the manufacturing process with coherent cw laser light of the same wavelength as the excimer lasers, i.e. 193 or 248 nm. Since excimer lasers have insufficient coherence, other lasers are used for this inspection, e.g. frequency-stabilized and frequency-converted diode lasers. The TopWave 266 is ideal for sophisticated measurement and production tasks in e.g. semicon inspection, lithography or Raman spectroscopy. It is a cost-effective and reliable laser that enables the user to concentrate on their application rather than worrying about the light source. |
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All Suppliers | |
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From Asia: | |
Shinagawa Intercity Tower C 2–15–3, Konan, Minato-ku Tokyo 108–6290 Japan | www.nikon.com Tel.: +81 3 6433 3600 |
Outside Asia: | |
2539 W 237th St Suite A Torrance, CA 90505 United States | |
Hermann-von-Helmholtz-Platz 6 76344 Eggenstein-Leopoldshafen Germany | |
6325 Lusk Boulevard San Diego, CA 92121 United States | |
37/5 Ponderosa Parade Warriewood NSW 2102 Australia | |
All wavelengths. Lochhamer Schlag 19 82166 Gräfelfing Germany Quality: ISO 9001:2015 www.toptica.com Social: Facebook, LinkedIn, YouTube E-mail: Tel.: +49 89 85 83 70 Fax: +49 89 85 83 72 00 | Photolithography is a microfabrication technique that is commonly used to pattern parts of a thin film or the bulk of a substrate. It is also often termed as optical lithography or UV lithography, if ultraviolett wavelengths are used. The techninque uses light to transfer a geometric pattern from a photomask onto a light-sensitive chemical ("photoresist" or "resist") on the substrate. This first irradiation step is followed by a series of chemical treatments that either engrave the exposed pattern into the material underneath the photoresist, or it enables deposition of a new material in the desired pattern on top of it. The optical lens system of photolithography setups is usually very complex and is inspected during the manufacturing process with coherent cw laser light of the same wavelength as the excimer lasers, i.e. 193 or 248 nm. Since excimer lasers have insufficient coherence, other lasers are used for this inspection, e.g. frequency-stabilized and frequency-converted diode lasers. The TopWave 266 is ideal for sophisticated measurement and production tasks in e.g. semicon inspection, lithography or Raman spectroscopy. It is a cost-effective and reliable laser that enables the user to concentrate on their application rather than worrying about the light source. |
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